EV Group Launches Next-Generation EVG120 Resist Processing System
EV Group has introduced the EVG120, an advanced resist processing system that offers higher throughput and flexibility for semiconductor manufacturing. This next-generation platform is optimized for various applications, including advanced packaging and MEMS.
New ultra-compact platform adds in-situ resist thickness metrology, wafer edge exposure and EVG150-class performance in a smaller-scale, highly flexible format.
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AI Summary
EV Group has introduced the EVG120, an advanced resist processing system that offers higher throughput and flexibility for semiconductor manufacturing. This next-generation platform is optimized for various applications, including advanced packaging and MEMS.
FAQs
What is the EVG120 resist processing system?
The EVG120 is an automated resist processing system designed for high-volume semiconductor manufacturing, featuring enhanced capabilities and a compact design.
What applications is the EVG120 suitable for?
The EVG120 is ideal for advanced packaging, MEMS, image sensors, photonics, and other fast-growing application areas.
What are the key features of the EVG120?
Key features include increased capacity, new capabilities like wafer edge exposure, in-situ resist thickness measurement, and energy-efficient stand-by mode.
Where can I see the EVG120 in action?
The EVG120 will be showcased at the SPIE Advanced Lithography and Patterning Conference in San Jose, California, from February 22-26.
How can I order the EVG120 system?
Orders for the EVG120 are currently being accepted, and demonstrations can be arranged at EVG’s corporate headquarters.
AI-assisted summary generated on Feb 18, 2026. Source link below.